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US07248765B2 Temperature-insensitive polymeric optical AWG device and manufacturing method therefor 失效
温度不敏感的聚合物光学AWG器件及其制造方法

Temperature-insensitive polymeric optical AWG device and manufacturing method therefor
Abstract:
Provided are a temperature-insensitive polymeric optical AWG device and method of manufacturing the same. The temperature-insensitive polymeric optical AWG device includes: polymeric grating channel waveguides interposed between free propagation slab regions on a substrate between the input and output waveguides and having different lengths; a plurality of hollow trenches formed by selectively etching a surface of the substrate under the polymeric grating channel waveguides and allowing the polymeric grating channel waveguides to freely thermally expand from the substrate depending on a temperature variation; and a shield layer shielding entrances of the hollow trenches so that the polymeric grating channel waveguides do not flow into the hollow trenches.
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