Invention Grant
US07248765B2 Temperature-insensitive polymeric optical AWG device and manufacturing method therefor
失效
温度不敏感的聚合物光学AWG器件及其制造方法
- Patent Title: Temperature-insensitive polymeric optical AWG device and manufacturing method therefor
- Patent Title (中): 温度不敏感的聚合物光学AWG器件及其制造方法
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Application No.: US11361204Application Date: 2006-02-23
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Publication No.: US07248765B2Publication Date: 2007-07-24
- Inventor: Jong Moo Lee , Sun Tak Park , Yong Soon Baek
- Applicant: Jong Moo Lee , Sun Tak Park , Yong Soon Baek
- Applicant Address: KR
- Assignee: Electronics and Telecommunications Research Institute
- Current Assignee: Electronics and Telecommunications Research Institute
- Current Assignee Address: KR
- Agency: Blakely Sokoloff Taylor & Zafman
- Priority: KR10-2005-0047918 20050603
- Main IPC: G02B6/34
- IPC: G02B6/34

Abstract:
Provided are a temperature-insensitive polymeric optical AWG device and method of manufacturing the same. The temperature-insensitive polymeric optical AWG device includes: polymeric grating channel waveguides interposed between free propagation slab regions on a substrate between the input and output waveguides and having different lengths; a plurality of hollow trenches formed by selectively etching a surface of the substrate under the polymeric grating channel waveguides and allowing the polymeric grating channel waveguides to freely thermally expand from the substrate depending on a temperature variation; and a shield layer shielding entrances of the hollow trenches so that the polymeric grating channel waveguides do not flow into the hollow trenches.
Public/Granted literature
- US20060274995A1 Temperature-insensitive polymeric optical AWG device and manufacturing method therefor Public/Granted day:2006-12-07
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