Invention Grant
US07250599B2 Energy filter image generator for electrically charged particles and the use thereof 有权
用于带电粒子的能量滤波器图像发生器及其用途

Energy filter image generator for electrically charged particles and the use thereof
Abstract:
The invention relates to an energy filter image generator for filtering electrically charged particles. The inventive energy filter comprises at least two toroidal energy analysers (30, 40) arranged one inside the other. A transfer lens device (20) is disposed between the plane of emergence (5) of the first energy analyser (30) and the plane of incidence of the second energy analyser (40), thereby making it possible to obtain the perfect energy filtered reproduction of the surface (1′) of a sample on a detector (10).
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