Invention Grant
US07250599B2 Energy filter image generator for electrically charged particles and the use thereof
有权
用于带电粒子的能量滤波器图像发生器及其用途
- Patent Title: Energy filter image generator for electrically charged particles and the use thereof
- Patent Title (中): 用于带电粒子的能量滤波器图像发生器及其用途
-
Application No.: US10533598Application Date: 2003-11-04
-
Publication No.: US07250599B2Publication Date: 2007-07-31
- Inventor: Dietmar Funnemann , Matthias Escher
- Applicant: Dietmar Funnemann , Matthias Escher
- Applicant Address: DE Taunusstein
- Assignee: Omicron Nano Technology GmbH
- Current Assignee: Omicron Nano Technology GmbH
- Current Assignee Address: DE Taunusstein
- Agency: Calfee, Halter & Griswold, LLP
- Priority: DE10252129 20021104
- International Application: PCT/EP03/12283 WO 20031104
- International Announcement: WO2004/042770 WO 20040521
- Main IPC: H01J39/05
- IPC: H01J39/05 ; H01J49/44

Abstract:
The invention relates to an energy filter image generator for filtering electrically charged particles. The inventive energy filter comprises at least two toroidal energy analysers (30, 40) arranged one inside the other. A transfer lens device (20) is disposed between the plane of emergence (5) of the first energy analyser (30) and the plane of incidence of the second energy analyser (40), thereby making it possible to obtain the perfect energy filtered reproduction of the surface (1′) of a sample on a detector (10).
Public/Granted literature
- US20060016974A1 Energy filter image generator for electrically charged particles and the use thereof Public/Granted day:2006-01-26
Information query