发明授权
- 专利标题： Microelectromechanical system sensor and method for using
- 专利标题（中）： 微机电系统传感器及其使用方法
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申请号： US10839095申请日： 2004-05-05
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公开(公告)号： US07253615B2公开(公告)日： 2007-08-07
- 发明人: Ertugrul Berkcan , Wei-Cheng Tian
- 申请人： Ertugrul Berkcan , Wei-Cheng Tian
- 申请人地址： US NY Niskayuna
- 专利权人： General Electric Company
- 当前专利权人： General Electric Company
- 当前专利权人地址： US NY Niskayuna
- 代理机构： Fletcher Yoder
- 主分类号： G01R33/02
- IPC分类号： G01R33/02
摘要：
According to some embodiments, an apparatus includes a movable portion through which a sensing current is to be conducted. The movable portion might comprise, for example, a beam or plate suspended above a well in a Microelectromechanical System (MEMS) substrate. The apparatus may also include a sensing portion coupled to the movable portion, and the movable portion and/or sensing portion may move in a direction normal to the substrate in response to a magnetic field.