发明授权
- 专利标题: Chemical mechanical polishing system having multiple polishing stations and providing relative linear polishing motion
- 专利标题(中): 化学机械抛光系统具有多个抛光台并提供相对的线性抛光运动
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申请号: US11329648申请日: 2006-01-10
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公开(公告)号: US07255632B2公开(公告)日: 2007-08-14
- 发明人: Robert D. Tolles , Norm Shendon , Sasson Somekh , Ilya Perlov , Eugene Gantvarg , Harry Q. Lee
- 申请人: Robert D. Tolles , Norm Shendon , Sasson Somekh , Ilya Perlov , Eugene Gantvarg , Harry Q. Lee
- 申请人地址: US CA Santa Clara
- 专利权人: Applied Materials, Inc.
- 当前专利权人: Applied Materials, Inc.
- 当前专利权人地址: US CA Santa Clara
- 代理机构: Fish & Richardson
- 主分类号: B24B1/00
- IPC分类号: B24B1/00
摘要:
A polishing method usable in an apparatus including a rotatable member rotatable about a first axis, at least one substrate head assembly supported on said rotatable member, and at least two polishing surfaces arranged below said rotatable member at respective angular positions about said first axis is described. In one implementation, a substrate can be mounted onto a first one of said at least one substrate head assembly. The rotatable member can be rotated to a position so that the substrate overlies a selected one of the polishing surfaces. The substrate can be engaged with said selected polishing surface and relative linear movement imparted between the selected polishing surface and the first substrate head assembly, while the substrate is engaged with the selected polishing surface.
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