发明授权
- 专利标题： MEMS switch
- 专利标题（中）： MEMS开关
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申请号： US11471511申请日： 2006-06-21
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公开(公告)号： US07257307B2公开(公告)日： 2007-08-14
- 发明人: Che-heung Kim , Hyung Choi , In-sang Song , Sang-hun Lee , Sang-wook Kwon
- 申请人： Che-heung Kim , Hyung Choi , In-sang Song , Sang-hun Lee , Sang-wook Kwon
- 申请人地址： KR Gyeonggi-do
- 专利权人： Samsung Electronics Co., Ltd.
- 当前专利权人： Samsung Electronics Co., Ltd.
- 当前专利权人地址： KR Gyeonggi-do
- 代理机构： Sughrue Mion, PLLC
- 优先权： KR10-2005-0115958 20051130
- 主分类号： G02B6/00
- IPC分类号： G02B6/00
摘要：
A MEMS (micro electro mechanical system) switch, which includes a substrate; a fixed electrode formed on an upper side of the substrate; a signal line formed on both sides of the fixed electrode; a contact member formed on an upper side of the signal line at a distance from said fixed electrode and contacting an edging portion of the signal line; a supporting member supporting the contact member to be movable; and a moving electrode disposed on an upper side of the supporting member.
公开/授权文献
- US20070122074A1 MEMS switch 公开/授权日：2007-05-31
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