发明授权
US07259364B2 Method for the production of image sensors 有权
图像传感器的制作方法

  • 专利标题: Method for the production of image sensors
  • 专利标题(中): 图像传感器的制作方法
  • 申请号: US10497668
    申请日: 2002-12-04
  • 公开(公告)号: US07259364B2
    公开(公告)日: 2007-08-21
  • 发明人: Tarek Lulé
  • 申请人: Tarek Lulé
  • 申请人地址: NL Amsterdam
  • 专利权人: STMicroelectronics N.V.
  • 当前专利权人: STMicroelectronics N.V.
  • 当前专利权人地址: NL Amsterdam
  • 代理机构: Wolf, Greenfield & Sacks, P.C.
  • 代理商 Lisa K. Jorgenson; James H. Morris
  • 优先权: DE10160234 20011207
  • 国际申请: PCT/DE02/04439 WO 20021204
  • 国际公布: WO03/054919 WO 20030703
  • 主分类号: H01L31/00
  • IPC分类号: H01L31/00
Method for the production of image sensors
摘要:
The invention relates to a method for producing image sensors on the basis of TFA technology including of an amorphous thin-layer system that has been applied on a crystalline ASIC. The inventive method enables the production of image sensors on the basis of TFA technology, which improve the picture quality at low luminous intensity by reducing the dark currents. The photodiodes in the thin-layer material that are configured as pixels are linked with transistor structures in the crystalline ASIC via back electrodes. The transistor structures have particularly low leakage currents due to implantation technology or optimization of the production process.
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