Invention Grant
- Patent Title: Gyro-sensor comprising a plurality of component units, and fabricating method thereof
- Patent Title (中): 包括多个部件单元的陀螺传感器及其制造方法
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Application No.: US11141054Application Date: 2005-06-01
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Publication No.: US07263883B2Publication Date: 2007-09-04
- Inventor: Tae-sik Park , Moon-chul Lee , Chang-youl Moon
- Applicant: Tae-sik Park , Moon-chul Lee , Chang-youl Moon
- Applicant Address: KR Suwon-si
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Suwon-si
- Agency: Sughrue Mion, PLLC
- Priority: KR10-2004-0039680 20040601
- Main IPC: G01P1/02
- IPC: G01P1/02

Abstract:
Provided are a gyro-sensor including a plurality of component units and a method of fabricating the gyro-sensor. The gyro-sensor includes: a substrate; a micro electro mechanical system structure including a surface including a predetermined area in which a cavity is formed and connected to an upper surface of the substrate to output a vibration signal proportional to an external rotation force; and a circuit unit positioned in the cavity, converting the vibration signal into a predetermined electric signal proportional to a circular angular velocity, and outputting the predetermined electric signal.
Public/Granted literature
- US20050262941A1 Gyro-sensor comprising a plurality of component units, and fabricating method thereof Public/Granted day:2005-12-01
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