Invention Grant
- Patent Title: Precision multi-dimensional capacitive transducer
- Patent Title (中): 精密多维电容式换能器
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Application No.: US10996146Application Date: 2004-11-23
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Publication No.: US07263896B2Publication Date: 2007-09-04
- Inventor: Wayne Bonin
- Applicant: Wayne Bonin
- Agency: Schwegman, Lundberg, Woessner, & Kluth, P.A.
- Main IPC: G01B7/16
- IPC: G01B7/16 ; G01L1/00

Abstract:
A high precision force and displacement measuring device adapted to operate in at least two directions, including signal multiplexing scheme providing multiple signal channels to be transmitted through a single pick-up plate and sense amplifier, while maintaining high isolation between the channels, as well as identical electrical response characteristics of all channels. The device may be used in conjunction with a movable stage (such as on an optical microscope) to perform mechanical measurements on Micro Electro-Mechanical Systems (MEMS) devices.
Public/Granted literature
- US20050223811A1 Precision multi-dimensional capacitive transducer Public/Granted day:2005-10-13
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