发明授权
US07264436B2 Robot-guidance assembly for providing a precision motion of an object
有权
用于提供物体的精确运动的机器人引导组件
- 专利标题： Robot-guidance assembly for providing a precision motion of an object
- 专利标题（中）： 用于提供物体的精确运动的机器人引导组件
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申请号： US11062154申请日： 2005-02-18
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公开(公告)号： US07264436B2公开(公告)日： 2007-09-04
- 发明人: Ralf Tillmann
- 申请人： Ralf Tillmann
- 申请人地址： DE Raunheim
- 专利权人： Integrated Dynamics Engineering GmbH
- 当前专利权人： Integrated Dynamics Engineering GmbH
- 当前专利权人地址： DE Raunheim
- 代理机构： Ohlandt, Greeley, Ruggiero & Perle, L.L.P.
- 优先权： DE102004008289 20040220
- 主分类号： B25J18/02
- IPC分类号： B25J18/02
摘要：
There is provided a robot-guidance assembly for providing a precision motion of an object, especially for providing a precision motion of a disklike member such as a wafer, including a robot having at least one robot arm. The at least one robot arm has a free end and a fixed end. The robot can move the free end of the at least one robot arm in at least one moving plane. The assembly also includes a guiding apparatus for precisely guiding the free end of the at least one robot arm in the at least one moving plane. There is also provided a method for inspecting a surface of an object.
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