Invention Grant
- Patent Title: Method of enhancing connection strength for suspended membrane leads and substrate contacts
- Patent Title (中): 提高悬浮膜引线和基片触点连接强度的方法
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Application No.: US10980226Application Date: 2004-11-04
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Publication No.: US07264983B2Publication Date: 2007-09-04
- Inventor: Tzong-Sheng Lee , Jing-Hung Chiou , Jeng-Long Ou
- Applicant: Tzong-Sheng Lee , Jing-Hung Chiou , Jeng-Long Ou
- Applicant Address: TW Hsinchu
- Assignee: UniMEMS Manufacturing Co., Ltd.
- Current Assignee: UniMEMS Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsinchu
- Main IPC: H01L21/00
- IPC: H01L21/00

Abstract:
A method to enhance the connection strength of suspended membrane leads and substrate contacts is described. A reading circuit chip is provided and a sacrificial layer is formed thereon. Subsequently, an electrical contact window is created in the sacrificial layer to expose a conductive layer of the reading circuit chip. A metal layer is filled into the contact window and a conductive membrane is formed thereon to couple electrically to the metal layer. Afterward, an infrared measuring membrane and an upper dielectric layer are formed thereon.
Public/Granted literature
- US20060094150A1 Method of enhancing connection strength for suspended membrane leads and substrate contacts Public/Granted day:2006-05-04
Information query
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