Invention Grant
US07264983B2 Method of enhancing connection strength for suspended membrane leads and substrate contacts 失效
提高悬浮膜引线和基片触点连接强度的方法

Method of enhancing connection strength for suspended membrane leads and substrate contacts
Abstract:
A method to enhance the connection strength of suspended membrane leads and substrate contacts is described. A reading circuit chip is provided and a sacrificial layer is formed thereon. Subsequently, an electrical contact window is created in the sacrificial layer to expose a conductive layer of the reading circuit chip. A metal layer is filled into the contact window and a conductive membrane is formed thereon to couple electrically to the metal layer. Afterward, an infrared measuring membrane and an upper dielectric layer are formed thereon.
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