发明授权
- 专利标题： Electrostatic chuck and production method therefor
- 专利标题（中）： 静电吸盘及其制作方法
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申请号： US10814304申请日： 2004-04-01
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公开(公告)号： US07265962B2公开(公告)日： 2007-09-04
- 发明人: Shinya Miyaji , Xinwei Chen , Shinji Saito
- 申请人： Shinya Miyaji , Xinwei Chen , Shinji Saito
- 申请人地址： JP Kanagawa
- 专利权人： NHK Spring Co., Ltd.
- 当前专利权人： NHK Spring Co., Ltd.
- 当前专利权人地址： JP Kanagawa
- 代理机构： Arent Fox LLP
- 优先权： JP2003-099467 20030402
- 主分类号： H01T23/00
- IPC分类号： H01T23/00
摘要：
The present invention provides an electrostatic chuck comprising a substrate, a dielectric layer formed by thermal spraying on an upper face of the substrate, an internal electrode embedded in the dielectric layer, a feeder terminal portion extending from a lower face of the substrate to the internal electrode, and an electrode provided in the feeder terminal portion, wherein the feeder terminal portion and the substrate are fixed to each other by mechanical joining.
公开/授权文献
- US20040196614A1 Electrostatic chuck and production method therefor 公开/授权日：2004-10-07
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