发明授权
- 专利标题： Method of fabricating optical filters
- 专利标题（中）： 制造光学滤光片的方法
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申请号： US10871689申请日： 2004-06-02
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公开(公告)号： US07267781B2公开(公告)日： 2007-09-11
- 发明人: Dan A. Steinberg , Mindaugas F. Dautartas , David W. Sherrer
- 申请人： Dan A. Steinberg , Mindaugas F. Dautartas , David W. Sherrer
- 申请人地址： US MA Marlborough
- 专利权人： Shipley Company, L.L.C.
- 当前专利权人： Shipley Company, L.L.C.
- 当前专利权人地址： US MA Marlborough
- 代理商 Jonathan D. Baskin
- 主分类号： B29D11/00
- IPC分类号： B29D11/00 ; H01L21/00
摘要：
A method of fabricating optical filter is disclosed. The method includes providing the substrate and selectively etching the substrate to form a plurality of freestanding layers. A plurality of dielectric layers is disposed over an outer surface of each of the freestanding layers. The resultant optical filters may be used in a variety of applications including etalon applications.
公开/授权文献
- US20050003665A1 Method of fabricating optical filters 公开/授权日：2005-01-06
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