发明授权
- 专利标题: Optical image measuring apparatus for forming an image of an object to be measured based on interference light
- 专利标题(中): 用于基于干涉光形成待测物体的图像的光学图像测量装置
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申请号: US11073712申请日: 2005-03-08
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公开(公告)号: US07268885B2公开(公告)日: 2007-09-11
- 发明人: Kinpui Chan , Masahiro Akiba , Yasufumi Fukuma , Hiroyuki Otsuka , Hisashi Tsukada
- 申请人: Kinpui Chan , Masahiro Akiba , Yasufumi Fukuma , Hiroyuki Otsuka , Hisashi Tsukada
- 申请人地址: JP Tokyo
- 专利权人: Kabushiki Kaisha Topcon
- 当前专利权人: Kabushiki Kaisha Topcon
- 当前专利权人地址: JP Tokyo
- 代理机构: Edwards Angell Palmer & Dodge LLP
- 优先权: JP2004-074409 20040316
- 主分类号: G01B9/02
- IPC分类号: G01B9/02
摘要:
An optical image measuring apparatus capable of effectively obtaining a direct current component of a heterodyne signal which is composed of background light of interference light is provided. The optical image measuring apparatus includes: an optical interference system in which a light beam from a light source is divided into signal light and reference light by a beam splitter, a frequency of the reference light is shifted by a frequency shifter, and the signal light propagating through an object to be measured and the reference light reflected on a mirror are superimposed on each other by the beam splitter to produce interference light; beam splitters for dividing the interference light into interference light beams; shutters serving as an intensity modulating unit for modulating intensities of the respective interference light beams at predetermined intervals; CCDs for receiving the respective interference light beams whose intensities are modulated and outputting electrical signals; and a signal processing portion serving as a calculating unit for calculating an intensity of the direct current component corresponding to the background light of the interference light based on the outputted electrical signals.
公开/授权文献
- US20050206906A1 Optical image measuring apparatus 公开/授权日:2005-09-22
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