发明授权
- 专利标题: Method for manufacturing strained silicon directly-on-insulator substrate with hybrid crystalline orientation and different stress levels
- 专利标题(中): 用于制造具有混合晶体取向和不同应力水平的应变硅绝缘体上基板的方法
-
申请号: US11037622申请日: 2005-01-18
-
公开(公告)号: US07271043B2公开(公告)日: 2007-09-18
- 发明人: Huilong Zhu , Bruce B. Doris , Huajie Chen , Patricia M. Mooney , Stephen W. Bedell
- 申请人: Huilong Zhu , Bruce B. Doris , Huajie Chen , Patricia M. Mooney , Stephen W. Bedell
- 申请人地址: US NY Armonk
- 专利权人: International Business Machines Corporation
- 当前专利权人: International Business Machines Corporation
- 当前专利权人地址: US NY Armonk
- 代理机构: Scully, Scott, Murphy & Presser, P.C.
- 代理商 Ido Tuchman, Esq.
- 主分类号: H01L21/8238
- IPC分类号: H01L21/8238
摘要:
The present invention provides a strained Si directly on insulator (SSDOI) substrate having multiple crystallographic orientations and a method of forming thereof. Broadly, but in specific terms, the inventive SSDOI substrate includes a substrate; an insulating layer atop the substrate; and a semiconducting layer positioned atop and in direct contact with the insulating layer, the semiconducting layer comprising a first strained Si region and a second strained Si region; wherein the first strained Si region has a crystallographic orientation different from the second strained Si region and the first strained Si region has a crystallographic orientation the same or different from the second strained Si region. The strained level of the first strained Si region is different from that of the second strained Si region.
公开/授权文献
信息查询
IPC分类: