Invention Grant
- Patent Title: Method for manufacturing a monolithic ink-jet printhead
- Patent Title (中): 单片式喷墨打印头的制造方法
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Application No.: US10740573Application Date: 2003-12-22
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Publication No.: US07275308B2Publication Date: 2007-10-02
- Inventor: Hyeon-cheol Kim , Yong-soo Oh , Keon Kuk , Kwang-joon Yoon , Jae-sik Min , Sang-hyun Lee , Chang-seung Lee , Seog Soon Baek , Sang-wook Lee , Jong-cheol Shin
- Applicant: Hyeon-cheol Kim , Yong-soo Oh , Keon Kuk , Kwang-joon Yoon , Jae-sik Min , Sang-hyun Lee , Chang-seung Lee , Seog Soon Baek , Sang-wook Lee , Jong-cheol Shin
- Applicant Address: KR Suwon, Kyungki-do
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Suwon, Kyungki-do
- Agency: Lee & Morse, P.C.
- Priority: KR2001-66021 20011025
- Main IPC: H05B3/00
- IPC: H05B3/00

Abstract:
A method for manufacturing the same, wherein the monolithic ink-jet printhead includes a manifold for supplying ink, an ink chamber having a hemispheric shape, and an ink channel formed monolithically on a substrate; a silicon oxide layer, in which a nozzle for ejecting ink is centrally formed in the ink chamber, is deposited on the substrate; a heater having a ring shape is formed on the silicon oxide layer to surround the nozzle; a MOS integrated circuit is mounted on the substrate to drive the heater and includes a MOSFET and electrodes connected to the heater. The silicon oxide layer, the heater, and the MOS integrated circuit are formed monolithically on the substrate. Additionally, a DLC coating layer having a high hydrophobic property and high durability is formed on an external surface of the printhead.
Public/Granted literature
- US20040130597A1 Monolithic ink-jet printhead and method for manufacturing the same Public/Granted day:2004-07-08
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