发明授权
US07275432B2 Acceleration sensor and method of manufacturing acceleration sensor
有权
加速度传感器及加速度传感器的制造方法
- 专利标题： Acceleration sensor and method of manufacturing acceleration sensor
- 专利标题（中）： 加速度传感器及加速度传感器的制造方法
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申请号： US11440400申请日： 2006-05-25
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公开(公告)号： US07275432B2公开(公告)日： 2007-10-02
- 发明人: Yasuo Yamaguchi
- 申请人： Yasuo Yamaguchi
- 申请人地址： JP Tokyo
- 专利权人： Mitsubishi Denki Kabushiki Kaisha
- 当前专利权人： Mitsubishi Denki Kabushiki Kaisha
- 当前专利权人地址： JP Tokyo
- 代理机构： McDermott Will & Emery LLP
- 优先权： JP2003-411319 20031210
- 主分类号： G01P15/00
- IPC分类号： G01P15/00
摘要：
An acceleration sensor includes a semiconductor substrate, a sensing element formed on the semiconductor substrate, a bonding frame made of polysilicon which is formed on the semiconductor substrate and surrounds the sensing element, and a glass cap which is bonded to a top surface of the bonding frame made of polysilicon to cover the sensing element above the sensing element while being spaced by a predetermined distance from the sensing element. The bonding frame made of polysilicon is not doped with any impurity.
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