发明授权
US07276390B2 Long wavelength indium arsenide phosphide (InAsP) quantum well active region and method for producing same 失效
长波长磷化铟(InAsP)量子阱活性区及其制备方法

Long wavelength indium arsenide phosphide (InAsP) quantum well active region and method for producing same
摘要:
An InAsP active region for a long wavelength light emitting device and a method for growing the same are disclosed. In one embodiment, the method comprises placing a substrate in an organometallic vapor phase epitaxy (OMVPE) reactor, the substrate for supporting growth of an indium arsenide phosphide (InAsP) film, forming a quantum well layer of InAsP, and forming a barrier layer adjacent the quantum well layer, where the quantum well layer and the barrier layer are formed at a temperature of less than 520 degrees C. Forming the quantum well layer and the barrier layer at a temperature of less than 520 degrees C. results in fewer dislocations by suppressing relaxation of the layers. A long wavelength active region including InAsP quantum well layers and InGaP barrier layers is also disclosed.
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