发明授权
- 专利标题: Long wavelength indium arsenide phosphide (InAsP) quantum well active region and method for producing same
- 专利标题(中): 长波长磷化铟(InAsP)量子阱活性区及其制备方法
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申请号: US10230895申请日: 2002-08-29
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公开(公告)号: US07276390B2公开(公告)日: 2007-10-02
- 发明人: David P. Bour , Michael R. T. Tan , William H. Perez
- 申请人: David P. Bour , Michael R. T. Tan , William H. Perez
- 申请人地址: SG Singapore
- 专利权人: Avago Technologies General IP Pte Ltd
- 当前专利权人: Avago Technologies General IP Pte Ltd
- 当前专利权人地址: SG Singapore
- 主分类号: H01L21/205
- IPC分类号: H01L21/205
摘要:
An InAsP active region for a long wavelength light emitting device and a method for growing the same are disclosed. In one embodiment, the method comprises placing a substrate in an organometallic vapor phase epitaxy (OMVPE) reactor, the substrate for supporting growth of an indium arsenide phosphide (InAsP) film, forming a quantum well layer of InAsP, and forming a barrier layer adjacent the quantum well layer, where the quantum well layer and the barrier layer are formed at a temperature of less than 520 degrees C. Forming the quantum well layer and the barrier layer at a temperature of less than 520 degrees C. results in fewer dislocations by suppressing relaxation of the layers. A long wavelength active region including InAsP quantum well layers and InGaP barrier layers is also disclosed.
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