发明授权
US07277171B1 Flying mobile on-board ellipsometer, polarimeter, reflectometer and the like systems
有权
飞行移动式机载椭圆仪，偏振计，反射计等系统
- 专利标题： Flying mobile on-board ellipsometer, polarimeter, reflectometer and the like systems
- 专利标题（中）： 飞行移动式机载椭圆仪，偏振计，反射计等系统
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申请号： US11105852申请日： 2005-04-14
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公开(公告)号： US07277171B1公开(公告)日： 2007-10-02
- 发明人: Blaine D. Johs , Ping He , Martin M. Liphardt , Christopher A. Goeden , John A. Woollam , James D. Welch
- 申请人： Blaine D. Johs , Ping He , Martin M. Liphardt , Christopher A. Goeden , John A. Woollam , James D. Welch
- 申请人地址： US NE Lincoln
- 专利权人： J.A. Woollan Co., Inc.
- 当前专利权人： J.A. Woollan Co., Inc.
- 当前专利权人地址： US NE Lincoln
- 代理商 James D. Welch
- 主分类号： G01J4/00
- IPC分类号： G01J4/00
摘要：
A substantially self-contained “on-board” material system investigation system functionally mounted on a three dimensional locational system to enable positioning at desired locations on, and distances from, the surface of a large sample, including the capability to easily and conveniently change the angle-of-incidence of a beam of electromagnetic radiation onto a sample surface.