发明授权
US07277563B2 Capacitive micro pressure sensing member and fingerprint sensor using the same
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电容式微压感测元件和使用其的指纹传感器
- 专利标题: Capacitive micro pressure sensing member and fingerprint sensor using the same
- 专利标题(中): 电容式微压感测元件和使用其的指纹传感器
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申请号: US10638371申请日: 2003-08-12
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公开(公告)号: US07277563B2公开(公告)日: 2007-10-02
- 发明人: Bruce C. S. Chou
- 申请人: Bruce C. S. Chou
- 申请人地址: TW Hsinchu
- 专利权人: LighTuning Tech, Inc.
- 当前专利权人: LighTuning Tech, Inc.
- 当前专利权人地址: TW Hsinchu
- 代理机构: Birch, Stewart, Kolasch & Birch, LLP
- 优先权: TW91118142A 20020813
- 主分类号: G06K9/00
- IPC分类号: G06K9/00
摘要:
A capacitive micro pressure sensing member and a fingerprint sensor using the same. The sensing member includes a substrate, a first suspended structure, a first protrusion structure, and a second suspended structure. The first suspended structure is located above the substrate and includes a suspended thin plate and at least one compliant suspension arm connected to the suspended thin plate, which is movable so that a distance from the suspended thin plate to the substrate is changed. The first protrusion structure is arranged at a center portion of a top surface of the suspended thin plate. The second suspended structure is arranged on a top surface of the first protrusion structure with a center portion of the second suspended structure contacting the first protrusion structure. The second suspended structure covers the first suspended structure to form a sealed chamber together with the substrate.
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