Invention Grant
- Patent Title: Oscillating probe with a virtual probe tip
- Patent Title (中): 具有虚拟探针尖端的振荡探头
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Application No.: US10989744Application Date: 2004-11-16
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Publication No.: US07278297B2Publication Date: 2007-10-09
- Inventor: Marcin B. Bauza , Robert J. Hocken , Stuart T. Smith
- Applicant: Marcin B. Bauza , Robert J. Hocken , Stuart T. Smith
- Applicant Address: US NC Charlotte
- Assignee: Insitutec, Inc.
- Current Assignee: Insitutec, Inc.
- Current Assignee Address: US NC Charlotte
- Agency: Clements Walker
- Agent Christopher L. Bernard
- Main IPC: G01B5/28
- IPC: G01B5/28 ; G01N13/10 ; G12B21/02
Abstract:
An oscillating probe of an elongated rod, having a first free end, and a second end that is attached to at least one actuator to apply oscillation cycles to the rod. Oscillation of the elongated rod during at least one complete cycle of oscillation of the actuator causes the free end to move in at least one-dimensional envelope, producing a defined virtual probe tip geometry at the free end. The probe is connected to a system for utilizing information sensed as the free end is placed near a surface.
Public/Granted literature
- US20070056362A1 Oscillating probe with a virtual probe tip Public/Granted day:2007-03-15
Information query
