发明授权
US07279766B2 Photodiode sensor and photosensor for use in an imaging device
有权
用于成像设备的光电二极管传感器和光电传感器
- 专利标题: Photodiode sensor and photosensor for use in an imaging device
- 专利标题(中): 用于成像设备的光电二极管传感器和光电传感器
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申请号: US11001293申请日: 2004-12-02
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公开(公告)号: US07279766B2公开(公告)日: 2007-10-09
- 发明人: Howard E. Rhodes
- 申请人: Howard E. Rhodes
- 申请人地址: US ID Boise
- 专利权人: Micron Technology, Inc.
- 当前专利权人: Micron Technology, Inc.
- 当前专利权人地址: US ID Boise
- 代理机构: Dickstein Shapiro LLP
- 主分类号: H01L31/06
- IPC分类号: H01L31/06
摘要:
A multiple-trench photosensor for use in a CMOS imager having an improved charge capacity. The multi-trench photosensor may be either a photogate or photodiode structure. The multi-trench photosensor provides the photosensitive element with an increased surface area compared to a flat photosensor occupying a comparable area on a substrate. The multi-trench photosensor also exhibits a higher charge capacity, improved dynamic range, and a better signal-to-noise ratio. Also disclosed are processes for forming the multi-trench photosensor.
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