发明授权
- 专利标题: Apparatus with permanent magnetic lenses
- 专利标题(中): 带永久磁性镜片的设备
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申请号: US11418730申请日: 2006-05-03
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公开(公告)号: US07285785B2公开(公告)日: 2007-10-23
- 发明人: Bart Buijsse , Theodorus Hubertus Josephus Bisschops , Mark Theo Meuwese
- 申请人: Bart Buijsse , Theodorus Hubertus Josephus Bisschops , Mark Theo Meuwese
- 申请人地址: US OR Hillsboro
- 专利权人: FEI Company
- 当前专利权人: FEI Company
- 当前专利权人地址: US OR Hillsboro
- 代理机构: Scheinberg & Griner, LLP
- 代理商 Michael O. Scheinberg
- 优先权: NL1026006 20040422
- 主分类号: H01J1/50
- IPC分类号: H01J1/50 ; H01J37/147 ; H01J37/26
摘要:
The invention describes a particle-optical apparatus arranged to focus a beam (1) of electrically charged particles with the aid of two particle-optical lens systems (10, 20). The lens action is achieved by magnetic fields, which fields are generated by permanent-magnetic materials (13, 23). In contrast to magnetic lenses equipped with a coil, it is not easy in the case of lenses equipped with permanent-magnetic material to alter the focusing magnetic field with the aim of altering the optical power. In an apparatus according to the invention, the optical power of the lens systems is altered by altering the energy with which the beam (1) traverses the lens systems (10, 20). This can easily happen by altering the voltage of electrical power supplies (14, 24).
公开/授权文献
- US20060197030A1 Apparatus with permanent magnetic lenses 公开/授权日:2006-09-07