发明授权
US07286156B2 Light source device for scanning-exposure and method and apparatus for scanning-exposure
有权
用于扫描曝光的光源装置和用于扫描曝光的方法和装置
- 专利标题: Light source device for scanning-exposure and method and apparatus for scanning-exposure
- 专利标题(中): 用于扫描曝光的光源装置和用于扫描曝光的方法和装置
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申请号: US11229614申请日: 2005-09-20
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公开(公告)号: US07286156B2公开(公告)日: 2007-10-23
- 发明人: Kenichi Saito , Yoshinori Morimoto , Tsuyoshi Tanabe
- 申请人: Kenichi Saito , Yoshinori Morimoto , Tsuyoshi Tanabe
- 代理机构: Birch, Stewart, Kolasch & Birch, LLP
- 优先权: JP2004-275783 20040922
- 主分类号: B41J27/00
- IPC分类号: B41J27/00 ; G02B9/00 ; G02B9/08
摘要:
A blue laser light source is a semiconductor laser having a sapphire substrate that is transparent to a wavelength of a blue laser beam emitted from an active layer. A condenser lens converges the blue laser beam at a focal point where a modulator is placed. A slit plate limits the light flux on the exit side of the condenser lens. A slit of the slit plate is located at a depth position (Z) on an optical axis of the condenser lens, and the depth position satisfies the following conditions: Z≧Z0 (Z0
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