发明授权
US07286156B2 Light source device for scanning-exposure and method and apparatus for scanning-exposure 有权
用于扫描曝光的光源装置和用于扫描曝光的方法和装置

Light source device for scanning-exposure and method and apparatus for scanning-exposure
摘要:
A blue laser light source is a semiconductor laser having a sapphire substrate that is transparent to a wavelength of a blue laser beam emitted from an active layer. A condenser lens converges the blue laser beam at a focal point where a modulator is placed. A slit plate limits the light flux on the exit side of the condenser lens. A slit of the slit plate is located at a depth position (Z) on an optical axis of the condenser lens, and the depth position satisfies the following conditions: Z≧Z0 (Z0
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