发明授权
- 专利标题: Pressure sensor
- 专利标题(中): 压力传感器
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申请号: US11444302申请日: 2006-06-01
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公开(公告)号: US07287433B2公开(公告)日: 2007-10-30
- 发明人: Hiroaki Tanaka
- 申请人: Hiroaki Tanaka
- 申请人地址: JP Kariya
- 专利权人: DENSO CORPORATION
- 当前专利权人: DENSO CORPORATION
- 当前专利权人地址: JP Kariya
- 代理机构: Posz Law Group, PLC
- 优先权: JP2005-186271 20050627
- 主分类号: G01L9/06
- IPC分类号: G01L9/06
摘要:
A pressure sensor for detecting a pressure and for outputting a signal based on the piezoresistance effect includes a substrate having a sensor chip on one side in a thin portion and a concave portion on another side, a piezo-resistor in the sensor chip, a pedestal being attached to the substrate and having a through hole for introducing the pressure to the sensor chip and a gel material filled in the concave portion and the through hole for protecting the sensor chip. A ratio of a diameter of the through hole to a thickness of the pedestal is substantially within a range between 1 and 3.
公开/授权文献
- US20060288793A1 Pressure sensor 公开/授权日:2006-12-28
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