Invention Grant
- Patent Title: Integrated driver process flow
- Patent Title (中): 集成驱动程序流程
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Application No.: US10720498Application Date: 2003-11-24
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Publication No.: US07288424B2Publication Date: 2007-10-30
- Inventor: James A. Hunter , Charles B. Roxlo , Alexander Payne
- Applicant: James A. Hunter , Charles B. Roxlo , Alexander Payne
- Applicant Address: US CA San Jose
- Assignee: Silicon Light Machines Corporation
- Current Assignee: Silicon Light Machines Corporation
- Current Assignee Address: US CA San Jose
- Agency: Okamoto & Benedicto LLP
- Main IPC: H01L21/00
- IPC: H01L21/00
Abstract:
An integrated device includes one or more device drivers and a micro-electro-mechanical system (MEMS) structure monolithically coupled to the one or more device drivers. The one or more device drivers are configured to process received control signals and to transmit the processed control signals to the MEMS structure. Methods of fabricating integrated devices are also disclosed.
Public/Granted literature
- US20040106221A1 Integrated driver process flow Public/Granted day:2004-06-03
Information query
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