发明授权
- 专利标题: Lens made of a crystalline material
- 专利标题(中): 透镜由结晶材料制成
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申请号: US10983569申请日: 2004-11-08
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公开(公告)号: US07292388B2公开(公告)日: 2007-11-06
- 发明人: Birgit Enkisch , Hartmut Enkisch , Toralf Gruner
- 申请人: Birgit Enkisch , Hartmut Enkisch , Toralf Gruner
- 申请人地址: unknown Oberkochen
- 专利权人: Carl Zeiss SMT AG
- 当前专利权人: Carl Zeiss SMT AG
- 当前专利权人地址: unknown Oberkochen
- 代理机构: Fish & Richardson P.C.
- 主分类号: G02B13/14
- IPC分类号: G02B13/14
摘要:
As a preliminary stage in manufacturing a lens or lens part for an objective, in particular a projection objective for a microlithography projection system, an optical blank is made from a crystal material. As a first step in manufacturing the optical blank, one determines the orientation of a first crystallographic direction that is defined in the crystallographic structure of the material. The material is then machined into an optical blank so that the first crystallographic direction is substantially perpendicular to an optical blank surface of the optical blank. Subsequently, a marking is applied to the optical blank or to a mounting element of the optical blank. The marking has a defined relationship to a second crystallographic direction which is oriented at a non-zero angle relative to the first crystallographic direction.
公开/授权文献
- US20050170748A1 Lens made of a crystalline material 公开/授权日:2005-08-04
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