发明授权
- 专利标题: Wafer-leveled chip packaging structure and method thereof
- 专利标题(中): 晶圆级芯片封装结构及其方法
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申请号: US11186840申请日: 2005-07-22
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公开(公告)号: US07294920B2公开(公告)日: 2007-11-13
- 发明人: Shou-Lung Chen , Ching-Wen Hsiao , Yu-Hua Chen , Jeng-Dar Ko , Chih-Ming Tzeng , Jyh-Rong Lin , Shan-Pu Yu
- 申请人: Shou-Lung Chen , Ching-Wen Hsiao , Yu-Hua Chen , Jeng-Dar Ko , Chih-Ming Tzeng , Jyh-Rong Lin , Shan-Pu Yu
- 申请人地址: TW Hsinchu
- 专利权人: Industrial Technology Research Institute
- 当前专利权人: Industrial Technology Research Institute
- 当前专利权人地址: TW Hsinchu
- 代理机构: Bacon & Thomas PLLC
- 优先权: TW93122038A 20040723
- 主分类号: H01L23/04
- IPC分类号: H01L23/04
摘要:
This invention relates to a wafer-leveled chip packaging method, comprising the steps of: providing a wafer; attaching at least one first chip to the wafer; forming a first insulating layer on the wafer; forming a plurality of first conductive vias penetrating the first insulating layer, wherein parts of the first conductive vias are electrically connected with the first chip; forming a conductive pattern layer on the surface of the first insulating layer wherein the conductive pattern layer is electrically connected with the first conductive vias; forming a plurality of through holes penetrating the wafer; filling a second insulating layer in the through holes; and forming a plurality of second conductive vias in the second insulating layer, wherein the second conductive vias are electrically connected with the first conductive vias.
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