- 专利标题: Bubble suppressing flow controller with ultrasonic flow meter
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申请号: US11292839申请日: 2005-12-01
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公开(公告)号: US07297047B2公开(公告)日: 2007-11-20
- 发明人: Songjae Lee , Ho Seon Shin , Donald J. K. Olgado
- 申请人: Songjae Lee , Ho Seon Shin , Donald J. K. Olgado
- 申请人地址: US CA Santa Clara
- 专利权人: Applied Materials, Inc.
- 当前专利权人: Applied Materials, Inc.
- 当前专利权人地址: US CA Santa Clara
- 代理机构: Patterson & Sheridan
- 主分类号: B24B49/00
- IPC分类号: B24B49/00
摘要:
A method and apparatus for the delivery of slurry solution comprising an ultrasonic flow meter positioned between a fluid preparation manifold and a slurry delivery arm, and a shutoff valve positioned between a proportional valve and the slurry delivery arm. Also, a method and apparatus for the delivery of slurry solution including an ultrasonic flow meter positioned to receive fluid from a fluid preparation manifold, a proportional valve and stepper motor in communication with the flow meter, and a reverse flow restrictor in communication with the proportional valve and a slurry delivery arm.
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