发明授权
- 专利标题: Multiple electron beam system with electron transmission gates
- 专利标题(中): 具有电子传输门的多电子束系统
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申请号: US10856111申请日: 2004-05-28
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公开(公告)号: US07301263B2公开(公告)日: 2007-11-27
- 发明人: Juan R. Maldonado , Steven T. Coyle
- 申请人: Juan R. Maldonado , Steven T. Coyle
- 申请人地址: US CA Santa Clara
- 专利权人: Applied Materials, Inc.
- 当前专利权人: Applied Materials, Inc.
- 当前专利权人地址: US CA Santa Clara
- 代理机构: Janah & Associates, P.C.
- 主分类号: H01J43/00
- IPC分类号: H01J43/00
摘要:
A multiple electron beam source comprises a photon source to generate a photon beam, a lens to focus the photon beam, a photocathode having a photon receiving surface and an electron emitting surface, and an array of electron transmission gates spaced apart from the electron emitting surface of the photocathode by a distance dg. In one version, the multiple electron beam source comprises a photocathode stage assembly to move the photocathode relative to the array of electron transmission gates. In one version, the multiple electron beam source also comprises a plasmon-generating photon transmission plate comprising an array of photon transmission apertures and exterior surfaces capable of supporting plasmons.
公开/授权文献
- US20050264148A1 Multiple electron beam systems 公开/授权日:2005-12-01
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