发明授权
- 专利标题： Contacts for electrochemical processing
- 专利标题（中）： 电化学处理接点
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申请号： US10210972申请日： 2002-08-02
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公开(公告)号： US07303662B2公开(公告)日： 2007-12-04
- 发明人: Rashid Mavliev , Stan Tsai , Yongqi Hu , Paul Butterfield , Antoine Manens , Liang-Yuh Chen
- 申请人： Rashid Mavliev , Stan Tsai , Yongqi Hu , Paul Butterfield , Antoine Manens , Liang-Yuh Chen
- 申请人地址： US CA Santa Clara
- 专利权人： Applied Materials, Inc.
- 当前专利权人： Applied Materials, Inc.
- 当前专利权人地址： US CA Santa Clara
- 代理机构： Patterson & Sheridan
- 主分类号： C25F3/16
- IPC分类号： C25F3/16 ; C25F3/30 ; C25F7/00
摘要：
Systems and methods for electrochemically processing. A contact element defines a substrate contact surface positionable in contact a substrate during processing. In one embodiment, the contact element comprises a wire element. In another embodiment the contact element is a rotating member. In one embodiment, the contact element comprises a noble metal.
公开/授权文献
- US20040020788A1 Contacts for electrochemical processing 公开/授权日：2004-02-05
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