Invention Grant
US07304385B2 Semiconductor chip capable of implementing wire bonding over active circuits
有权
能够在有源电路上实现引线键合的半导体芯片
- Patent Title: Semiconductor chip capable of implementing wire bonding over active circuits
- Patent Title (中): 能够在有源电路上实现引线键合的半导体芯片
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Application No.: US11422330Application Date: 2006-06-06
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Publication No.: US07304385B2Publication Date: 2007-12-04
- Inventor: Kun-Chih Wang , Bing-Chang Wu
- Applicant: Kun-Chih Wang , Bing-Chang Wu
- Applicant Address: TW Hsin-Chu
- Assignee: United Microelectronics Corp.
- Current Assignee: United Microelectronics Corp.
- Current Assignee Address: TW Hsin-Chu
- Agent Winston Hsu
- Main IPC: H01L23/48
- IPC: H01L23/48 ; H01L23/52 ; H01L29/40

Abstract:
A reinforced bonding pad structure includes a bondable metal layer defined on a stress-buffering dielectric layer, and an intermediate metal layer damascened in a first inter-metal dielectric (IMD) layer disposed under the stress-buffering dielectric layer. The intermediate metal layer is situated directly under the bondable metal layer and is electrically connected to the bondable metal layer with a plurality of via plugs integrated with the bondable metal layer. A metal frame is damascened in a second IMD layer under the first IMD layer. The metal frame is situated directly under the intermediate metal layer for counteracting mechanical stress exerted on the bondable metal layer during bonding, when the thickness of said stress-buffering dielectric layer is greater than 2000 angstroms, the damascened metal frame may be omitted. An active circuit portion including active circuit components of the integrated circuit is situated directly under the metal frame.
Public/Granted literature
- US20060226547A1 SEMICONDUCTOR CHIP CAPABLE OF IMPLEMENTING WIRE BONDING OVER ACTIVE CIRCUITS Public/Granted day:2006-10-12
Information query
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