- 专利标题： Microelectromechanical system pressure sensor and method for making and using
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申请号： US11495318申请日： 2006-07-31
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公开(公告)号： US07305889B2公开(公告)日： 2007-12-11
- 发明人: Jeffrey Fortin , Kuna Kishore , Kanakasabapathi Subramanian
- 申请人： Jeffrey Fortin , Kuna Kishore , Kanakasabapathi Subramanian
- 申请人地址： US NY Niskayuna
- 专利权人： General Electric Company
- 当前专利权人： General Electric Company
- 当前专利权人地址： US NY Niskayuna
- 代理商 William E. Powell, III; Curtis B. Brueske
- 主分类号： H04R17/00
- IPC分类号： H04R17/00
摘要：
According to some embodiments, an apparatus includes a substrate that defines a plane. The apparatus also includes a first conducting plate that is substantially normal to the substrate and a second conducting plate that is (i) substantially normal to the substrate and (ii) deformable in response to a pressure.