Invention Grant
- Patent Title: System and method for wet cleaning a semiconductor wafer
- Patent Title (中): 用于湿式清洗半导体晶片的系统和方法
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Application No.: US10336631Application Date: 2003-01-04
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Publication No.: US07306002B2Publication Date: 2007-12-11
- Inventor: Yong Bae Kim , Jungyup Kim , Yong Ho Lee , In Kwon Jeong
- Applicant: Yong Bae Kim , Jungyup Kim , Yong Ho Lee , In Kwon Jeong
- Agency: Wilson & Ham
- Agent Thomas H. Ham
- Main IPC: B08B3/12
- IPC: B08B3/12

Abstract:
A system and method for cleaning a substrate, such as a semiconductor wafer, utilizes a rotatable wafer supporting assembly with a cylindrical body to provide stability for the substrate being cleaned, even at high rotational speeds. The rotatable wafer supporting assembly may include wafer holding mechanisms with pivotable confining members that are configured to hold the substrate using centrifugal force when the wafer supporting assembly is rotated. In an embodiment, the cleaning system may include a positioning system operatively connected to an acoustic transducer to provide meaningful control of the acoustic energy applied to a surface of the substrate by selectively changing the distance between the acoustic transducer and the substrate surface so that the substrate can be cleaned more effectively.
Public/Granted literature
- US20040132318A1 System and method for wet cleaning a semiconductor wafer Public/Granted day:2004-07-08
Information query
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