发明授权
US07306979B2 Method of fabricating thin film transistor substrate for display device
有权
制造显示装置用薄膜晶体管基板的方法
- 专利标题: Method of fabricating thin film transistor substrate for display device
- 专利标题(中): 制造显示装置用薄膜晶体管基板的方法
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申请号: US11391439申请日: 2006-03-29
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公开(公告)号: US07306979B2公开(公告)日: 2007-12-11
- 发明人: Youn Gyoung Chang , Heung Lyul Cho
- 申请人: Youn Gyoung Chang , Heung Lyul Cho
- 申请人地址: KR Seoul
- 专利权人: LG. Philips LCD Co., Ltd.
- 当前专利权人: LG. Philips LCD Co., Ltd.
- 当前专利权人地址: KR Seoul
- 代理机构: Morgan, Lewis & Bockius LLP
- 优先权: KR10-2003-71503 20031014
- 主分类号: H01L21/00
- IPC分类号: H01L21/00 ; H01L21/84 ; H01L21/336
摘要:
A method of fabricating a thin film transistor substrate for a display device is provided. The method includes the steps of forming a gate line and a gate electrode connected to the gate line; forming a gate insulating film disposed covering the gate line and the gate electrode; forming a semiconductor layer a on the gate insulating film; forming a data line on the gate insulating film intersecting the gate line with the gate insulating film between the data line and the gate line to define a pixel region, a source electrode connected to the data line, a drain electrode opposed to the source electrode with the semiconductor layer therebetween, and a first upper storage electrode overlapping the gate line with the gate insulating film and the semiconductor layer therebetween; forming a protective film disposed covering the gate line, the data line, and the thin film transistor; and forming a pixel electrode connected on a side surface basis to the drain electrode and the first upper storage electrode, and a second upper storage electrode connected via a first contact hole to the first upper storage electrode on a side surface basis.
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