Invention Grant
US07310029B2 Bulk acoustic resonator with matched resonance frequency and fabrication process
有权
具有匹配谐振频率和制造工艺的体声波谐振器
- Patent Title: Bulk acoustic resonator with matched resonance frequency and fabrication process
- Patent Title (中): 具有匹配谐振频率和制造工艺的体声波谐振器
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Application No.: US10883690Application Date: 2004-07-06
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Publication No.: US07310029B2Publication Date: 2007-12-18
- Inventor: Philippe Robert , Pascal Ancey , Grégory Caruyer
- Applicant: Philippe Robert , Pascal Ancey , Grégory Caruyer
- Applicant Address: FR Paris FR Montrouge
- Assignee: Commissariat a l'energie Atomique,ST Microelectronics SA
- Current Assignee: Commissariat a l'energie Atomique,ST Microelectronics SA
- Current Assignee Address: FR Paris FR Montrouge
- Agency: Oliff & Berridge PLC
- Priority: FR0308715 20030717
- Main IPC: H03H9/15
- IPC: H03H9/15 ; H03H9/54

Abstract:
The resonator comprises a piezoelectric layer arranged between two electrodes. An electrical heating resistor is arranged in thermal contact with at least one of the electrodes. Temporary heating of the electrode enables the material constituting the electrode to be partially evaporated, so as to thin the electrode and thus adjust the resonance frequency. Measurement of the resonance frequency in the course of evaporation enables the heating to be interrupted when the required resonance frequency is obtained. One of the electrodes can be arranged on a substrate formed by an acoustic Bragg grating. The resonator can comprise a substrate comprising a cavity whereon one of the electrodes is at least partially arranged.
Public/Granted literature
- US20050028336A1 Bulk acoustic resonator with matched resonance frequency and fabrication process Public/Granted day:2005-02-10
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