发明授权
US07310029B2 Bulk acoustic resonator with matched resonance frequency and fabrication process
有权
具有匹配谐振频率和制造工艺的体声波谐振器
- 专利标题： Bulk acoustic resonator with matched resonance frequency and fabrication process
- 专利标题（中）： 具有匹配谐振频率和制造工艺的体声波谐振器
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申请号： US10883690申请日： 2004-07-06
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公开(公告)号： US07310029B2公开(公告)日： 2007-12-18
- 发明人: Philippe Robert , Pascal Ancey , Grégory Caruyer
- 申请人： Philippe Robert , Pascal Ancey , Grégory Caruyer
- 申请人地址： FR Paris FR Montrouge
- 专利权人： Commissariat a l'energie Atomique,ST Microelectronics SA
- 当前专利权人： Commissariat a l'energie Atomique,ST Microelectronics SA
- 当前专利权人地址： FR Paris FR Montrouge
- 代理机构： Oliff & Berridge PLC
- 优先权： FR0308715 20030717
- 主分类号： H03H9/15
- IPC分类号： H03H9/15 ; H03H9/54
摘要：
The resonator comprises a piezoelectric layer arranged between two electrodes. An electrical heating resistor is arranged in thermal contact with at least one of the electrodes. Temporary heating of the electrode enables the material constituting the electrode to be partially evaporated, so as to thin the electrode and thus adjust the resonance frequency. Measurement of the resonance frequency in the course of evaporation enables the heating to be interrupted when the required resonance frequency is obtained. One of the electrodes can be arranged on a substrate formed by an acoustic Bragg grating. The resonator can comprise a substrate comprising a cavity whereon one of the electrodes is at least partially arranged.