发明授权
US07311531B2 Anisotropic conductive connector, conductive paste composition, probe member, wafer inspection device and wafer inspection method 有权
各向异性导电连接器,导电膏组合物,探针构件,晶片检查装置和晶圆检查方法

Anisotropic conductive connector, conductive paste composition, probe member, wafer inspection device and wafer inspection method
摘要:
An anisotropically conductive connector, and applications thereof, by which good conductivity is retained over a long period of time even when it is used in electrical inspection of a plurality of integrated circuits formed on a wafer repeatedly over a great number of times, and thus high durability and long service life are achieved. The anisotropically conductive connector includes elastic anisotropically conductive films, in each of which a plurality of conductive parts for connection containing conductive particles and extending in a thickness-wise direction of the film are formed. The conductive particles contained in the conductive parts for connection in the anisotropically conductive connector are obtained by laminating surfaces of core particles exhibiting magnetism with a coating layer formed of a high-conductive metal, and the coating layer is a coating layer having a high hardness.
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