Invention Grant
US07314515B2 Apparatus for fabrication of GaN bulk single crystal and fabrication method of GaN single crystal ingot using the same 失效
GaN体单晶的制造装置及使用其的GaN单晶锭的制造方法

  • Patent Title: Apparatus for fabrication of GaN bulk single crystal and fabrication method of GaN single crystal ingot using the same
  • Patent Title (中): GaN体单晶的制造装置及使用其的GaN单晶锭的制造方法
  • Application No.: US11220709
    Application Date: 2005-09-08
  • Publication No.: US07314515B2
    Publication Date: 2008-01-01
  • Inventor: Jai-yong Han
  • Applicant: Jai-yong Han
  • Applicant Address: KR Suwon-Si, Gyeonggi-Do
  • Assignee: Samsung Corning Co., Ltd.
  • Current Assignee: Samsung Corning Co., Ltd.
  • Current Assignee Address: KR Suwon-Si, Gyeonggi-Do
  • Agency: Buchanan Ingersoll & Rooney PC
  • Priority: KR10-2005-0007999 20050128
  • Main IPC: C30B1/00
  • IPC: C30B1/00
Apparatus for fabrication of GaN bulk single crystal and fabrication method of GaN single crystal ingot using the same
Abstract:
An apparatus for fabricating a GaN single crystal and a fabrication method for producing GaN single crystal ingot are provided. The apparatus includes: a reactor including a ceiling, a floor and a wall with a predetermined height encompassing an internal space between the ceiling and the floor, wherein the ceiling is opposite to the floor; a quartz vessel on the floor containing Ga metal; a mount installed on the ceiling on which a GaN substrate is mounted, the GaN substrate being opposite to the quartz vessel; a first gas supplying unit supplying the quartz vessel with hydrogen chloride (HCl) gas; a second gas supplying unit supplying the internal space of the reactor with ammonia (NH3) gas; and a heating unit installed in conjunction with the wall of the reactor for heating the internal space, wherein the lower portion of the internal space is heated to a higher temperature than the upper portion.
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