发明授权
- 专利标题: Bake system
- 专利标题(中): 烤制
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申请号: US11156530申请日: 2005-06-21
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公开(公告)号: US07317172B2公开(公告)日: 2008-01-08
- 发明人: Dong-woo Lee , Tae-gyu Kim , Jin-sung Lee
- 申请人: Dong-woo Lee , Tae-gyu Kim , Jin-sung Lee
- 申请人地址: KR Suwon
- 专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人地址: KR Suwon
- 代理机构: Sughrue Mion, PLLC
- 优先权: KR10-2004-0046048 20040621
- 主分类号: F27B5/08
- IPC分类号: F27B5/08 ; F27B5/10 ; F27B9/06
摘要:
Provided is a bake system. The bake system includes a heating plate having a heating plate having a substrate on an upper surface. A case is disposed below the heating plate to support the heating plate; a first cover is disposed above the heating plate and coupled to the case to form a chamber; and a second cover is disposed in the first cover, and directly above the substrate in the bake process for preventing heat convection on the substrate.
公开/授权文献
- US20060011605A1 Bake system 公开/授权日:2006-01-19
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