发明授权
- 专利标题: Xenon ion beam to improve track width definition
- 专利标题(中): 氙离子束提高轨道宽度定义
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申请号: US10827950申请日: 2004-04-20
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公开(公告)号: US07320170B2公开(公告)日: 2008-01-22
- 发明人: Stuart Kao , Chunping Luo , Chaopeng Chen , Takahiko Machita , Daisuke Miyauchi , Jei-Wei Chang
- 申请人: Stuart Kao , Chunping Luo , Chaopeng Chen , Takahiko Machita , Daisuke Miyauchi , Jei-Wei Chang
- 申请人地址: US CA Milpitas JP Tokyo
- 专利权人: Headway Technologies, Inc.,TDK Corporation
- 当前专利权人: Headway Technologies, Inc.,TDK Corporation
- 当前专利权人地址: US CA Milpitas JP Tokyo
- 代理机构: Saile Ackerman LLC
- 代理商 Stephen B. Ackerman
- 主分类号: G11B5/187
- IPC分类号: G11B5/187 ; C23F1/02
摘要:
Using a beam of xenon ions together with a suitable mask, a GMR stack is ion milled until a part of it, no more than about 0.1 microns thick, has been removed so that a pedestal, having sidewalls comprising a vertical section that includes all of the free layer, has been formed. This is followed by formation of the longitudinal bias and conductive lead layers in the usual way. Using xenon as the sputtering gas enables the point at which milling is terminated to be more precisely controlled.
公开/授权文献
- US20050231856A1 Xenon ion beam to improve track width definition 公开/授权日:2005-10-20
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