发明授权
- 专利标题: Electroluminescence device with nanotip diodes
- 专利标题(中): 具有纳米二极管的电致发光器件
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申请号: US11090386申请日: 2005-03-23
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公开(公告)号: US07320897B2公开(公告)日: 2008-01-22
- 发明人: Sheng Teng Hsu , Tingkai Li , Wei-Wei Zhuang
- 申请人: Sheng Teng Hsu , Tingkai Li , Wei-Wei Zhuang
- 申请人地址: US WA Camas
- 专利权人: Sharp Laboratories of Amrica, Inc.
- 当前专利权人: Sharp Laboratories of Amrica, Inc.
- 当前专利权人地址: US WA Camas
- 代理机构: Law Office of Gerald Maliszewski
- 代理商 Gerald Maliszewski
- 主分类号: H01L21/66
- IPC分类号: H01L21/66
摘要:
A nanotip electroluminescence (EL) diode and a method are provided for fabricating said device. The method comprises: forming a plurality of Si nanotip diodes; forming a phosphor layer overlying the nanotip diode; and, forming a top electrode overlying the phosphor layer. The nanotip diodes are formed by: forming a Si substrate with a top surface; forming a Si p-well; forming an n+ layer of Si, having a thickness in the range of 30 to 300 nanometers (nm) overlying the Si p-well; forming a reactive ion etching (RIE)-induced polymer grass overlying the substrate top surface; using the RIE-induced polymer grass as a mask, etching areas of the substrate not covered by the mask; and, forming the nanotip diodes in areas of the substrate covered by the mask.
公开/授权文献
- US20060214172A1 Electroluminescence device with nanotip diodes 公开/授权日:2006-09-28
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