发明授权
US07321465B2 Method of optimizing an objective with fluoride crystal lenses, and objective with fluoride crystal lenses
失效
氟化物晶体透镜优化目标的方法,以及氟化物晶体透镜的目标
- 专利标题: Method of optimizing an objective with fluoride crystal lenses, and objective with fluoride crystal lenses
- 专利标题(中): 氟化物晶体透镜优化目标的方法,以及氟化物晶体透镜的目标
-
申请号: US11071699申请日: 2005-03-02
-
公开(公告)号: US07321465B2公开(公告)日: 2008-01-22
- 发明人: Michael Totzeck , Vladimir Kamenov , Toralf Gruner
- 申请人: Michael Totzeck , Vladimir Kamenov , Toralf Gruner
- 申请人地址: DE Oberkochen
- 专利权人: Carl Zeiss SMT AG
- 当前专利权人: Carl Zeiss SMT AG
- 当前专利权人地址: DE Oberkochen
- 代理机构: Fish & Richardson P.C.
- 优先权: DE10241102 20020903; DE10243080 20020916; DE10253355 20021114; DE10304116 20030131
- 主分类号: G02B27/28
- IPC分类号: G02B27/28
摘要:
A numerical optimizing method serves to reduce harmful effects caused by intrinsic birefringence in lenses of a fluoride crystal material of cubic crystal structure in an objective, particularly a projection objective for a microlithography system. Under the optimizing method, an optimizing function which takes at least one birefringence-related image aberration into account is minimized. The birefringence-related image aberration is determined from a calculation for a light ray passing through the fluoride crystal lenses. To the extent that the birefringence-related image aberration is a function of parameters of the light ray, it depends only on geometric parameters of the light ray. The numerical optimizing method is used to produce objectives in which an optical retardation as well as an asymmetry of the optical retardation are corrected. The lenses are arranged in homogeneous groups, where each homogeneous group is corrected for the optical retardation asymmetry.
公开/授权文献
信息查询