发明授权
- 专利标题: Fabrication method for polycrystalline silicon thin film and apparatus using the same
- 专利标题(中): 多晶硅薄膜的制造方法及使用其的装置
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申请号: US10952718申请日: 2004-09-30
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公开(公告)号: US07326295B2公开(公告)日: 2008-02-05
- 发明人: Ji-Yong Park , Hye-Hyang Park
- 申请人: Ji-Yong Park , Hye-Hyang Park
- 申请人地址: KR Suwon
- 专利权人: Samsung SDI Co., Ltd.
- 当前专利权人: Samsung SDI Co., Ltd.
- 当前专利权人地址: KR Suwon
- 代理机构: H.C. Park & Associates, PLC
- 优先权: KR10-2003-0073196 20031020
- 主分类号: C30B25/12
- IPC分类号: C30B25/12
摘要:
The present invention relates to a fabrication method for polycrystalline silicon thin film in which amorphous silicon is crystallized by laser using a mask having a mixed structure of laser transmission pattern group and laser non-transmission pattern group, wherein the mask comprises two or more of dot pattern groups in which the non-transmission pattern group is perpendicular to a scan directional axis, and the dot pattern groups are formed in a certain shape and comprise first non-transmission patterns that are not respectively arranged in a row in an axis direction perpendicular to the scan directional axis, and second non-transmission patterns that are formed in the same arrangement as the first non-transmission patterns, but are positioned in such a manner that the second non-transmission patterns are parallel to the first non-transmission patterns and vertical axis of the scan directional axis.
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