发明授权
US07327457B2 Apparatus and method for optical characterization of a sample over a broadband of wavelengths while minimizing polarization changes
有权
用于在波长宽带上对样品进行光学表征的设备和方法，同时最小化极化变化
- 专利标题： Apparatus and method for optical characterization of a sample over a broadband of wavelengths while minimizing polarization changes
- 专利标题（中）： 用于在波长宽带上对样品进行光学表征的设备和方法，同时最小化极化变化
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申请号： US10750636申请日： 2003-12-19
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公开(公告)号： US07327457B2公开(公告)日： 2008-02-05
- 发明人: Ray Hebert , Marc Aho , Abdul Rahim Forouhi
- 申请人： Ray Hebert , Marc Aho , Abdul Rahim Forouhi
- 申请人地址： US CA Santa Clara
- 专利权人： n&k Technology, Inc.
- 当前专利权人： n&k Technology, Inc.
- 当前专利权人地址： US CA Santa Clara
- 代理机构： Lumen Intellectual Property Services, Inc.
- 主分类号： G01J4/00
- IPC分类号： G01J4/00
摘要：
An apparatus and method for optically characterizing the reflection and transmission properties of a sample with a beam of light having a small diameter on a surface of the sample over a broadband of wavelengths, from 190 nm to 1100 nm. Reflective optical components, including off-axis parabolic mirrors with a collimated incident or reflected broadband beam of light, minimize non-chromatic aberration. Angles of incidence and reflection from optical components and the sample are kept substantially near normal to the optical components and the sample to minimize changes in the polarization of the beam of light. The apparatus and method further disclose an optical light path that can be focused by adjusting the position of an off-axis parabolic mirror and a planar mirror.
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