发明授权
- 专利标题： Apparatus for detecting an amount of strain and method for manufacturing same
- 专利标题（中）： 用于检测应变量的装置及其制造方法
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申请号： US11298527申请日： 2005-12-12
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公开(公告)号： US07331102B2公开(公告)日： 2008-02-19
- 发明人: Hiroshi Nagasaka , Naoki Yoshida , Hiroshi Kodama
- 申请人： Hiroshi Nagasaka , Naoki Yoshida , Hiroshi Kodama
- 申请人地址： JP Tokyo
- 专利权人： Nagano Keiki Co., Ltd.
- 当前专利权人： Nagano Keiki Co., Ltd.
- 当前专利权人地址： JP Tokyo
- 代理机构： Steptoe & Johnson LLP
- 优先权： JPP2002-287881 20020930
- 主分类号： H01C17/06
- IPC分类号： H01C17/06 ; H01C17/28
摘要：
An apparatus for detecting an amount of strain comprises a strain generating part, an electrical insulating layer and sensing elements. The strain generating part is a member to which strain is to be applied. The electrical insulating layer is formed on the strain generating part. The sensing elements are formed on the electrical insulating layer. Each of the sensing elements is made of a silicon film. The silicon film comprises a poly-crystalline main layer and a poly-crystalline interface-layer, which comes into contact with the electrical insulating layer.
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