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US07333650B2 Defect inspection apparatus 失效
缺陷检查装置

Defect inspection apparatus
摘要:
A defect inspection apparatus for inspecting an object to be inspected for a defect by processing an image taken from the object, includes: neural networks provided respectively for individual defect types to be classified; a learning unit which makes the neural networks learn based on the corresponding defect types to be classified; and a defect detection unit which classifies and detects defect types using the neural networks that have learned.
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