发明授权
- 专利标题: Projection method including pupillary filtering and a projection lens therefor
- 专利标题(中): 投影方法包括瞳孔滤光和投影透镜
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申请号: US10975496申请日: 2004-10-29
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公开(公告)号: US07336342B2公开(公告)日: 2008-02-26
- 发明人: Hubert Holderer , Christian Hembd-Soellner , Rudolf Von Buenau , Ulrich Haag
- 申请人: Hubert Holderer , Christian Hembd-Soellner , Rudolf Von Buenau , Ulrich Haag
- 申请人地址: DE Oberkochen
- 专利权人: Carl Zeiss SMT AG
- 当前专利权人: Carl Zeiss SMT AG
- 当前专利权人地址: DE Oberkochen
- 代理机构: Sughrue Mion, PLLC
- 优先权: DE10220324 20020429
- 主分类号: G03B27/54
- IPC分类号: G03B27/54 ; G03B27/42
摘要:
A catadioptric lens with optical elements, which are arranged along an optical axis and with at least one concave mirror located in the vicinity of a pupillar surface of the projection lens. The concave mirror is sub-divided into a number of annular or honeycomb mirror segments, which can be displaced independently in relation to one another with the aid of piezoelectric drive elements. The mirror can be used as a phase-shifting pupillar filter, whereby the filtration function can be adjusted by the relative displacement of the mirror elements in relation to one another.
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