发明授权
US07336342B2 Projection method including pupillary filtering and a projection lens therefor 有权
投影方法包括瞳孔滤光和投影透镜

Projection method including pupillary filtering and a projection lens therefor
摘要:
A catadioptric lens with optical elements, which are arranged along an optical axis and with at least one concave mirror located in the vicinity of a pupillar surface of the projection lens. The concave mirror is sub-divided into a number of annular or honeycomb mirror segments, which can be displaced independently in relation to one another with the aid of piezoelectric drive elements. The mirror can be used as a phase-shifting pupillar filter, whereby the filtration function can be adjusted by the relative displacement of the mirror elements in relation to one another.
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