发明授权
- 专利标题: Transistor structures
- 专利标题(中): 晶体管结构
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申请号: US10350819申请日: 2003-01-24
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公开(公告)号: US07339187B2公开(公告)日: 2008-03-04
- 发明人: John F. Wager, III , Randy L. Hoffman
- 申请人: John F. Wager, III , Randy L. Hoffman
- 申请人地址: US OR Corvallis
- 专利权人: State of Oregon acting by and through the Oregon State Board of Higher Education on behalf of Oregon State University
- 当前专利权人: State of Oregon acting by and through the Oregon State Board of Higher Education on behalf of Oregon State University
- 当前专利权人地址: US OR Corvallis
- 代理机构: Klarquist Sparkman, LLP
- 主分类号: H01L29/24
- IPC分类号: H01L29/24
摘要:
Enhancement mode, field effect transistors wherein at least a portion of the transistor structure may be substantially transparent. One variant of the transistor includes a channel layer comprising a substantially insulating, substantially transparent, material selected from ZnO, SnO2, or In2O3. A gate insulator layer comprising a substantially transparent material is located adjacent to the channel layer so as to define a channel layer/gate insulator layer interface. A second variant of the transistor includes a channel layer comprising a substantially transparent material selected from substantially insulating ZnO, SnO2 or In2O3, the substantially insulating ZnO, SnO2, or In2O3 being produced by annealing. Devices that include the transistors and methods for making the transistors are also disclosed.
公开/授权文献
- US20030218222A1 Transistor structures and methods for making the same 公开/授权日:2003-11-27
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