Invention Grant
US07343668B2 Method of manufacturing perpendicular magnetic recording head capable of highly precisely defining gap distance 失效
制造能够高精度地定义间隙距离的垂直磁记录头的制造方法

Method of manufacturing perpendicular magnetic recording head capable of highly precisely defining gap distance
Abstract:
A method of manufacturing a perpendicular magnetic recording head is provided. The method accurately defines a gap layer. The method includes forming a lower gap layer made of a non-magnetic material on a main magnetic pole layer. An upper gap layer is formed on the lower gap layer, the upper gap layer being made of the non-magnetic material. A resist layer is formed on the upper gap layer, and the resist layer is removed from an end surface. The upper gap layer not covered with the resist layer is removed, while exposing a new film surface by removing a surface oxidation layer of the resist layer. A return path layer is formed by plating on the exposed lower gap layer, the upper gap layer, and the resist layer through the plating underlayer.
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