- 专利标题: Coating composition for insulating film production, preparation method of insulation film by using the same, insulation film for semi-conductor device prepared therefrom, and semi-conductor device comprising the same
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申请号: US10516493申请日: 2004-03-31
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公开(公告)号: US07345351B2公开(公告)日: 2008-03-18
- 发明人: Myung-Sun Moon , Min-Jin Ko , Hye-Yeong Nam , Jung-Won Kang , Bum-Gyu Choi , Byung-Ro Kim , Gwi-Gwon Kang , Young-Duk Kim , Sang-Min Park
- 申请人: Myung-Sun Moon , Min-Jin Ko , Hye-Yeong Nam , Jung-Won Kang , Bum-Gyu Choi , Byung-Ro Kim , Gwi-Gwon Kang , Young-Duk Kim , Sang-Min Park
- 申请人地址: KR Seoul
- 专利权人: LG Chem, Ltd.
- 当前专利权人: LG Chem, Ltd.
- 当前专利权人地址: KR Seoul
- 代理机构: McKenna Long & Aldridge LLP
- 优先权: KR10-2003-0022307 20030409
- 国际申请: PCT/KR2004/000747 WO 20040331
- 国际公布: WO2004/090058 WO 20041021
- 主分类号: H01L21/31
- IPC分类号: H01L21/31
摘要:
The present invention relates to a coating composition for insulating film production, a preparation method of a low dielectric insulating film using the same, a low dielectric insulating film for a semiconductor device prepared therefrom, and a semiconductor device comprising the same, and more particularly to a coating composition for insulating film production having a low dielectric constant and that is capable of producing an insulating film with superior mechanical strength (elasticity), a preparation method of a low dielectric insulating film using the same, a low dielectric insulating film for a semiconductor device prepared therefrom, and a semiconductor device comprising the same. The coating composition of the present invention comprises an organic siloxane resin having a small molecular weight, and water, and significantly improves low dielectricity and mechanical strength of an insulating film.
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